The techniques and processes for microfabricating atomic frequency references are a series of key advances developed at NIST between 2002 and 2004. The NIST highly miniaturized frequency reference physics packages are fabricated using processing developed initially for microelectronics and microelectromechanical systems (MEMS). This MEMS fabrication method has enormous advantages over traditional methods: extremely small, highly scalable components, low-power operation, wafer-level processing and assembly and a high degree of uniformity from device to device. These advantages present a compelling argument that frequency references fabricated with the methods outlined here are a viable technology for commercialization and are likely to make a substantial impact on society in the future.
1. Si-based atomic vapor cells
2. Cell heaters
4. Physics package integration
6. Summary of fabrication capabilities
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